A Liquid Optical Phase Shifter with an Embedded Electrowetting Actuator

We demonstrate an electrowetting-based liquid optical phase shifter. The phase shifter consists of two immiscible liquid layers with different refractive indices. Sandwiched between the two liquids is a rigid membrane that moves freely along the optical axis and supported by a compliant surround. When applied with a pressure, the thicknesses of both liquid layers change, which induces a difference in optical path, resulting in a phase shift. A miniaturized electrowetting-based actuator is used to produce hydraulic pressure. A multi-layered SU8 bonded structure was fabricated. A phase shift of 171° was observed when the device was incorporated in a Mach-Zehnder interferometer and driven with 100 V.